张咪,王海

• 1:首都师范大学物理系

摘要(Abstract)：

用直流磁控溅射方法在玻璃基片上制备了[Ni_(80)Fe_(20)/Cu]_(20)多层膜,其中采用了靶表磁场强度不同的靶腔沉积铜层,利用X射线衍射和振动样品磁强计对Cu(100nm)/[Ni_(80)Fe_(20)(0.9nm)/Cu(tCu)]_(20)两个系列样品的结构和磁性进行了表征。靶表磁场较弱时沉积的多层膜具有良好的层间耦合振荡行为,而靶表磁场较强时制备的多层膜没有出现反铁磁耦合。依据上述事实,我们推测靶表磁场强度的不同会影响Ni Fe/Cu界面扩散,进而对多层膜样品的磁性产生影响。用靶表磁场较弱的靶腔沉积中间层铜能够有效减小界面互溶程度,改善镍铁与铜的成层质量。而靶表磁场较强的靶腔溅射出的铜原子具有较高能量,在界面处扩散并与镍铁层互溶,破坏了层状结构。

关键词(KeyWords)： NiFe/Cu多层膜;靶表磁场;结构;层间耦合

Abstract:

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基金项目(Foundation):

作者(Author): 张咪,王海

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